The technique of tagging lapping and polishing slurries with fluorescent material is a promising subsurface damage (SSD) detection method for detecting SSD of optical component and perceiving its formation. However, currently only CdSe/ZnS QDs, CdSSe/ZnS QDs and Rhodamine 6G (R6G) were used to detect SSD, the feasibility of other types of QDs for SSD detection is not been analyzed in detail. And compared with QDs, R6G have a lower fluorescence intensity and is prone to photobleaching. Therefore, in this paper, we not only investigated the feasibility of various types of QDs for SSD detection theoretically and experimentally, but also used the anti-fluorescence quenching agent to enhance the fluorescence of R6G solution, and further studied the influence of anti-fluorescence quenching agent on the fluorescence of SSD tagged by R6G. It is found that (1) no matter how excitation intensity changes, the InP/ZnS QDs, CuInS2/ZnS QDs, R6G, R6G containing anti-fluorescence quenching agent and C QDs can be used to detect SSD; (2)CdSe/ZnS QDs can be used to detect SSD when the excitation intensity is higher than 33 mW; (3)Si QDs, Perovskite QDs, CdSe QDs, and InP QDs can’t be used to detect SSD; (4) The influence of anti-fluorescence quenching agent on the fluorescence of R6G in SSD is related to excitation intensity. This study lays a foundation for detecting the distribution and depth of SSD and perceiving the formation mechanism of SSD in brittle optical materials.
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