Dr. Yaogang Lian Profile

Dr. Yaogang Lian

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Publications (2)

Proceedings Article | 23 September 2009 Paper

Fast and accurate computation of partially coherent imaging by stacked pupil shift operator

Yaogang Lian, Xin Zhou

Proceedings Volume 7488, 74883G (2009) https://doi.org/10.1117/12.833488

KEYWORDS: Coherence imaging, Lithography, Photomasks, Computer simulations, Light, Matrix multiplication, Lithographic illumination, System on a chip, Device simulation, Apodization

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Proceedings Article | 23 September 2009 Paper

What is a good empirical model?

Eldar Khaliullin, Yaogang Lian, Mark Davey, Xin Zhou

Proceedings Volume 7488, 74883P (2009) https://doi.org/10.1117/12.829731

KEYWORDS: Data modeling, Calibration, Process modeling, Lithography, Cadmium sulfide, Estimation theory, Optical proximity correction, Statistical analysis, Statistical modeling, Computer simulations

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