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Dr. Ying-Chou Cheng
at TSMC
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 21 March 2007 Paper
Patterning effect and correlated electrical model of post-OPC MOSFET devices
Y. C. Cheng, T. H. Ou, M. H. Wu, W. L. Wang, J. H. Feng, W. C. Huang, C. M. Lai, R. G. Liu, Y. C. Ku
Proceedings Volume 6521, 65210G (2007) https://doi.org/10.1117/12.717254
KEYWORDS: Optical lithography, Instrument modeling, Data modeling, Critical dimension metrology, Transistors, Field effect transistors, Manufacturing, Design for manufacturing, Silicon, Lithography
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