Ying-chen Wu
at Brion Technologies (Shenzhen) Co., Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11327, 113270B (2020) https://doi.org/10.1117/12.2552001
KEYWORDS: Etching, Metrology, Calibration, Scanning electron microscopy, Data modeling, Optical proximity correction, Critical dimension metrology, Performance modeling, Image processing, Semiconducting wafers

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