Yongxiang Shen
at National Univ. of Defense Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 February 2022 Paper
Proceedings Volume 12166, 1216607 (2022) https://doi.org/10.1117/12.2604938
KEYWORDS: Ion beams, Ions, Optical components, Etching, Defense technologies, Sputter deposition, Mathematical modeling, Control systems, Beam controllers, Temperature metrology

Proceedings Article | 5 November 2020 Paper
Proceedings Volume 11568, 115681O (2020) https://doi.org/10.1117/12.2580188
KEYWORDS: Silicon, Ultrasonics, Crystals, Surface finishing

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