In order to study the evolution state of silicon combustion wave induced by millisecond pulse laser in monocrystalline silicon, Using optical shadow imaging to measure the distance and time of combustion wave, analyze the plasma state at different times, Study the influence from different laser energy density and the number of pluses to expansion rate and expansion distance. The results of research show that the direction of combustion wave expand is mainly the reverse of the incident laser. The pulse train of millisecond laser act on monocrystalline silicon produce a temperature accumulation effect, and the threshold value declines obviously. the peak expansion rate increases rapidly as the energy density increases.
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