With the raising requirements in micro optical systems, the available machines become hard to achieve the process dynamic and accuracy in all aspects. This makes compact design based on fluid/structure interactions (FSI) important. However, there is a difficulty in studying FSI with oil film as fluid domain. This paper aims at static characteristic design of a hydrostatic guide-way with capillary restrictors based on FSI. The pressure distribution of the oil film land is calculated by solving the Reynolds-equation with Galerkin technique. The deformation of structure is calculated by commercial FEM software, MSC. Nastran. A matlab program is designed to realize the coupling progress by modifying the load boundary in the submitting file and reading the deformation result. It’s obvious that the stiffness of the hydrostatic bearing decreases with the weakening of the bearing structure. This program is proposed to make more precise prediction of bearing stiffness.
Nanotechnology is the science and engineering that manipulate matters at nano scale, which can be used to create many new materials and devices with a vast range of applications. As the nanotech product increasingly enters the commercial marketplace, nanometrology becomes a stringent and enabling technology for the manipulation and the quality control of the nanotechnology. However, many measuring instruments, for instance scanning probe microscopy, are limited to relatively small area of hundreds of micrometers with very low efficiency. Therefore some intelligent sampling strategies should be required to improve the scanning efficiency for measuring large area. This paper presents a Gaussian process based intelligent sampling method to address this problem. The method makes use of Gaussian process based Bayesian regression as a mathematical foundation to represent the surface geometry, and the posterior estimation of Gaussian process is computed by combining the prior probability distribution with the maximum likelihood function. Then each sampling point is adaptively selected by determining the position which is the most likely outside of the required tolerance zone among the candidates and then inserted to update the model iteratively. Both simulationson the nominal surface and manufactured surface have been conducted on nano-structure surfaces to verify the validity of the proposed method. The results imply that the proposed method significantly improves the measurement efficiency in measuring large area structured surfaces.
Along with the rapid development of the science and technology in fields such as space optics, multi-scale enriched freeform surfaces are widely used to enhance the performance of the optical systems in both functionality and size reduction. Multi-sensor technology is considered as one of the promising methods to measure and characterize these surfaces at multiple scales. This paper presents a multi-sensor data fusion based measurement method to purposely extract the geometric information of the components with different scales which is used to establish a holistic geometry of the surface via data fusion. To address the key problems of multi-sensor data fusion, an intrinsic feature pattern based surface registration method is developed to transform the measured datasets to a common coordinate frame. Gaussian zero-order regression filter is then used to separate each measured data in different scales, and the datasets are fused based on an edge intensity data fusion algorithm within the same wavelength. The fused data at different scales is then merged to form a new surface with holistic multiscale information. Experimental study is presented to verify the effectiveness of the proposed method.
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