We developed a negative-type photoresist of WOx film and obtained a low noise groove. We also confirmed a feasibility of the transmissive stamper using the WOx film for multi-layer discs.
We realized acceptable read/write performances at a track pitch of 320 nm and a bit length of 75 nm, even with an NA of 0.65 and a wavelength of 405 nm, using side-wall-annealing. In addition to this result, we suggested the possibility of a higher linear density; that is, a jitter value of less than 15% was obtained both on land and in groove at a bit length of 60 nm, which corresponds to an areal density of 34 Gbit/in2.
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