Yukari Aoki
at Canon Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 June 2006 Paper
Yukari Aoki, Kuniyuki Morita, Kyosuke Deguchi, Toshimori Miyakoshi, Yasuyuki Miyaoka, Tomoyuki Hiroki, Osamu Koyama
Proceedings Volume 6282, 62821L (2006) https://doi.org/10.1117/12.692308
KEYWORDS: Ultraviolet radiation, Oxygen, Photoresist materials, Lithography, Sputter deposition, Glasses, Atomic force microscopy, Transmission electron microscopy, Photoresist developing, Electron beam lithography

Proceedings Article | 9 September 2004 Paper
Jun Sumioka, Yukari Aoki, Kazuoki Hongu, Yasushi Hozumi, Osamu Koyama
Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.556692
KEYWORDS: Annealing, Magnetism, Molybdenum, Objectives, Semiconductor lasers, Modulation, Multiphoton fluorescence microscopy, Pulsed laser operation, Optical storage, Laser optics

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