Dr. Yuping Ren Profile

Dr. Yuping Ren

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 16 October 2017 Paper

Yuping Ren, Guoxiang Ning, Wenchao Jiang, Xiang Hu, Lloyd Litt, Paul Ackmann

Proceedings Volume 10451, 104511M (2017) https://doi.org/10.1117/12.2280570

KEYWORDS: Process control, OLE for process control, Critical dimension metrology, Reticles, Photomasks, Lithography, Etching, Metrology, Analytics

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Keywords/Phrases