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Yutaka Imai
Principal Engineer at Sony Corporation
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Publications (1)
Proceedings Article | 7 May 1999 Paper
New deep-UV microscope
Naoya Eguchi, Michio Oka, Yutaka Imai, Masaki Saito, Shigeo Kubota
Proceedings Volume 3740, (1999) https://doi.org/10.1117/12.347845
KEYWORDS: Deep ultraviolet, Microscopes, Scanning electron microscopy, Ultraviolet radiation, Objectives, Charge-coupled devices, Optical resolution, Optical microscopes, Electron microscopes, Magnetism
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