Mr. Yuto Nagasaka Profile

Yuto Nagasaka

at Osaka Univ

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Proceedings Article | 5 September 2007 Paper

Circular motion control of an optically trapped microprobe for nano-position sensing

Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi

Proceedings Volume 6644, 66441K (2007) https://doi.org/10.1117/12.734471

KEYWORDS: Optical spheres, Motion measurement, Silicon, Motion detection, Optical trapping, Laser beam diagnostics, Silica, Anisotropy, Motion controllers, Signal processing

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As a position sensing probe for Nano-CMM which measures three-dimensional shapes of microparts, we propose a novel probing technique using circular motion of an optically trapped microsphere. In this report, a fundamental principle is described for sensing a coordinate on a work surface using a circular motion probe. The circular motion of the trapped sphere near a work surface becomes an ellipse compressed perpendicularly to the surface due to the change of viscous drag of the sphere. The elliptical orbit of the trapped sphere depends on a distance from the surface and a normal vector direction of the surface. By processing the elliptical orbit, the circular motion probe can detect a position and a plane normal vector of the work surface simultaneously. In order to verify feasibility of this method, fundamental experiments are carried out. The circular motion probe is approached to a vertical silicon cleavage surface. The behavior of the trapped sphere near the surface agrees well with the theory. Based on the elliptical orbit of the trapped sphere near the surface, a position and a plane normal vector of the surface are estimated. It is verified that the circular motion probe can detect a position of a work surface with resolution of better than 50nm and detect a plane normal vector of the surface.

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