Lobster eye optics are expected as to be a wide-field telescope and are suitable for future X-ray sky surveys and monitoring missions. The ultra-lightweight X-ray optics have been developed using MEMS technologies and the same way can be applied to the fabrication of lobster eye optics. A large number of slits with 20 micro-meters width were formed by an etching process in a 4-inch Si wafer with 300 micro-meters thickness. To collect X-rays on a focal plane, the wafer was plastic-deformed into a spherical shape with a radius of curvature of 1000 mm. Two deformed wafers were assembled in such a way as to arrange the slits of each wafer orthogonally. Then, samples of lobster eye optics were completed and the fabrication process flow with MEMS technologies can be confirmed.
We have been developing ultra-lightweight Wolter type-I X-ray telescopes fabricated with MEMS technologies for GEO-X (GEOspace X-ray imager) which is a small satellite mission to perform soft X-ray imaging spectroscopy of the entire Earth’s magnetosphere. The telescope is our original type of micropore optics and possesses lightness (∼5 g), a short focal length (∼250 mm), and a wide field of view (∼5° × ∼5°). The MEMS X-ray telescope is made of 4-inch Si (111) wafers. The Si wafer is first processed by deep reactive ion etching, which has numerous curvilinear micropores (a 20-μm width) whose sidewalls are utilized as X-ray reflective mirrors. High-temperature hydrogen annealing and chemical mechanical polishing processes are applied to make those sidewalls smooth and flat enough to reflect X-rays. After that, the wafer is plastic-deformed into a spherical shape and Pt-coated by a plasma atomic layer deposition process to focus X-rays with high reflectivity. Finally, we assemble two optics bent with different curvatures (1000- and 333-mm radii) and complete the Wolter type-I telescope. We optimized each process and conducted an X-ray irradiation test to assemble the full-processed optics into an EM telescope for the GEO-X mission, which enabled to complete the telescope to achieve an angular resolution of ∼4.8 arcmin in FWHM in the assembled telescope. We report on our latest development status and the X-ray imaging performance of the GEO-X EM telescope.
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