The plasma spectrometry is an emerging method to distinguish the thin-film laser damage. Laser irradiation film surface occurrence of flash, using the spectrometer receives the flash spectrum, extracting the spectral peak, and by means of the spectra of the thin-film materials and the atmosphere has determine the difference, as a standard to determine the film damage. Plasma spectrometry can eliminate the miscarriage of justice which caused by atmospheric flashes, and distinguish high accuracy. Plasma spectra extraction algorithm is the key technology of Plasma spectrometry. Firstly, data de noising and smoothing filter is introduced in this paper, and then during the peak is detecting, the data packet is proposed, and this method can increase the stability and accuracy of the spectral peak recognition. Such algorithm makes simultaneous measurement of Plasma spectrometry to detect thin film laser damage, and greatly improves work efficiency.
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