CONFERENCE PROCEEDINGS
Advanced Search
Adel Merdassi
at McGill Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 7 March 2014 Paper
Design and fabrication of three-axis accelerometer sensor microsystem for wide temperature range applications using semi-custom process
A. Merdassi, Y. Wang, G. Xereas, V. Chodavarapu
Proceedings Volume 8973, 89730O (2014) https://doi.org/10.1117/12.2037344
KEYWORDS: Sensors, Capacitance, Temperature metrology, Microsystems, Silicon carbide, Californium, Transistors, Resistors, Amorphous silicon, Sputter deposition
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top