Today the laser induced damage threshold (LIDT) is one of the most important properties of laser components. As laser systems reach higher and higher optical power densities, optical components with improved LIDT values are highly required and their characterization has gained an ever-increasing importance. Many optical components rely on multilayer coating sequences of dielectric materials. Therefore, several design strategies such as the rugate and RISED concept have been applied for highly reflecting layer systems for the design wavelength of 1030 nm and an angle of incidence of 44°. The investigations were based on IBS and PIAD deposition methods using HfO2 and SiO2 for high respectively low refractive index material. A movable zone target was used for IBS in order to allow for direct material mixing to obtain for the rugate and mixed design continuous variations in the refractive index. The IBS designs have been tested for the LIDT at 560 fs and s-polarization and compared to those produced by PIAD. The designs were also tested in cw operation. The highest values for LIDT in pulsed conditions have been found for mixed IBS and PIAD designs with average values up to 2 J/cm2 at 1-on-1 test. The best results at 105 -on-1 test have been achieved by rugate designs with a LIDT of > 1.3 J/cm2 . In CW operation, the samples could be subjected to power densities of up to 1 MW/cm2 without the notification of any damage.
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