Mr. Lixing Zhang Profile

Lixing Zhang

at Soochow University

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Proceedings Article | 10 May 2023 Paper

Facile fabrication of high-density mushroom-shaped microstructures using the photo-lithographic technique

Li-xing Zhang, Wenbin Huang

Proceedings Volume 12554, 125540X (2023) https://doi.org/10.1117/12.2651874

KEYWORDS: Photoresist materials, Fabrication, Photoresist developing, Biomimetics, Scanning electron microscopy, Polydimethylsiloxane, Liquids, Photomasks, Optical microscopy, 3D microstructuring

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Biomimetic mushroom-shaped microstructures could ignite applications as dry adhesives and super-hydrophobic surfaces, however its facile fabrication still remains a challenge. In this work, we have proposed and demonstrated the facile fabrication of high-density mushroom-shaped microstructures using the photo-lithographic technique. The inverse “T” shaped light exposure in the photoresist directs the formation of the relief microstructure during chemical development, which serves as the mold for the bio-inspired surface. The requirement of one positive photoresist and one-step chemical development greatly simplifies the fabrication process, which also improves the reliability of the approach. The mushroom-shaped microstructures show significant super-hydrophobic properties and has high contact angles (157.2°). The liquid-repellent properties would be tailored by varying the densities of the mushroom-shaped microstructures, which was further exploited for droplet transportation and fusion. The effects of fabrication conditions on the parameters of the mushroom-shaped microstructures were also investigated. This new approach enables facile and controllable fabrication of mushroom-shaped microstructures, implying the potential for practical applications.

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