Vibration compensated high-resolution scanning white-light Linnik-interferometer

Stanislav Tereschenko; Peter Lehmann; Pascal Gollor; Peter Kuehnhold

doi:10.1117/12.2270226

26 June 2017 Vibration compensated high-resolution scanning white-light Linnik-interferometer

Stanislav Tereschenko, Peter Lehmann, Pascal Gollor, Peter Kuehnhold

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032940 (2017) https://doi.org/10.1117/12.2270226
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

We present a high-resolution Linnik scanning white-light interferometer (SWLI) with integrated distance measuring interferometer (DMI) for close-to-machine applications in the presence of environmental vibrations. The distance, measured by DMI during the depth-scan, is used for vibration compensation of SWLI signals. The reconstruction of the white-light interference signals takes place after measurement by reordering the captured images in accordance with their real positions obtained by the DMI and subsequent trigonometrical approximation. This system is the further development of our previously presented Michelson-interferometer. We are able to compensate for arbitrary vibrations with frequencies up to several kilohertz and amplitudes in the lower micrometer range. Completely distorted SWLI signals can be reconstructed and the surface topography can be obtained with high accuracy. We demonstrate the feasibility of the method by examples of practical measurements with and without vibrational disturbances.

Citation Download Citation

Stanislav Tereschenko, Peter Lehmann, Pascal Gollor, and Peter Kuehnhold "Vibration compensated high-resolution scanning white-light Linnik-interferometer", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032940 (26 June 2017); https://doi.org/10.1117/12.2270226

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available