Full-field deflectometry for optical characterization of high-precision mirrors

P. Antoine; L. Boussemaere; A. Bouwens; V. Moreau; B. Borguet; K. Sharshavina

doi:10.1117/12.2530380

21 June 2019 Full-field deflectometry for optical characterization of high-precision mirrors

P. Antoine, L. Boussemaere, A. Bouwens, V. Moreau, B. Borguet, K. Sharshavina

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 1105619 (2019) https://doi.org/10.1117/12.2530380
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Full-field deflectometry, which combines high-precision and robustness to external perturbations, is well adapted for the characterization of high-precision freeform mirrors. Instead of measuring the surface height map like interferometry does, the instrument will estimate the surface slopes in two perpendicular directions. The principle of the method is to measure the angular distribution by applying spatial filtering. This method has been called phase-shifting Schlieren deflectometry Inspection of mirrors in terms of slopes instead surface height offers multiple advantages. In particular, deflectometry is well adapted for the detection of waviness, which is a mid-spatial frequency topography error. Waviness detection during the diamond turning process is critical since it is hard to remove afterwards by polishing. Keeping the mirror mounted in the lathe during the measurement of its shape will simplify the process since it will avoid misalignment when remounting the mirror in the lathe.

Conference Presentation

Citation Download Citation

P. Antoine, L. Boussemaere, A. Bouwens, V. Moreau, B. Borguet, and K. Sharshavina "Full-field deflectometry for optical characterization of high-precision mirrors", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105619 (21 June 2019); https://doi.org/10.1117/12.2530380

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