Direct monochromatic optic control system of the thickness of thin-film interference coatings applied in vacuum

Y. O. Prosovskii; D. G. Denisov; O. F. Prosovskii; A. Y. Budnev

doi:10.1117/12.2525853

21 June 2019 Direct monochromatic optic control system of the thickness of thin-film interference coatings applied in vacuum

Y. O. Prosovskii, D. G. Denisov, O. F. Prosovskii, A. Y. Budnev

Author Affiliations +

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110563Z (2019) https://doi.org/10.1117/12.2525853
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

The principle of construction and design of the optical control system of the thickness of thin-film interference coatings applied in vacuum with the low-cost realization has been developed. The optical control system is built on the principle of measurement directly on the product - direct control at one wavelength (monochromatic). Model, allowing to evaluate technical capabilities of introduced system was made.

Citation Download Citation

Y. O. Prosovskii, D. G. Denisov, O. F. Prosovskii, and A. Y. Budnev "Direct monochromatic optic control system of the thickness of thin-film interference coatings applied in vacuum", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110563Z (21 June 2019); https://doi.org/10.1117/12.2525853

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