Design of AlN-subwavelength grating for deep ultraviolet wavelength reflector operating at 244 nm of wavelength

Yuusuke Takashima; Atsuki Sasada; Kentaro Nagamatsu; Masanobu Haraguchi; Yoshiki Naoi

doi:10.1117/12.2616175

27 October 2021 Design of AlN-subwavelength grating for deep ultraviolet wavelength reflector operating at 244 nm of wavelength

Yuusuke Takashima, Atsuki Sasada, Kentaro Nagamatsu, Masanobu Haraguchi, Yoshiki Naoi

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Proceedings Volume 11926, Optical Manipulation and Structured Materials Conference 2021; 1192618 (2021) https://doi.org/10.1117/12.2616175
Event: SPIE Technologies and Applications of Structured Light, 2021, Online, Japan

Abstract

Highly reflective reflector (> 99.9%) operating at deep ultraviolet (DUV) wavelength region around 244 nm was proposed by using subwavelength grating (SWG) patterned AlN substrate. Structural parameters of AlN-SWG were desgined for DUV reflector using the wavenumber dispersion relation of the eiegenmdoes resulting from its periodic refractive index distribution. The electromagnetic field calculated by finite-difference time-domain (FDTD) method revealed the polarization selective reflection characteristics of the designed AlN-SWG, and the SWG can achieve more than 99% reflectivity of p-polarization (the electric field is perpendicular to the grating fingers) at the DUV wavelength of 244 nm. This extremely high reflectivity, polarization selectivity and compactness of our AlN-SWG are very useful for various DUV applications, such as cavity of DUV laser diodes.

Citation Download Citation

Yuusuke Takashima, Atsuki Sasada, Kentaro Nagamatsu, Masanobu Haraguchi, and Yoshiki Naoi "Design of AlN-subwavelength grating for deep ultraviolet wavelength reflector operating at 244 nm of wavelength", Proc. SPIE 11926, Optical Manipulation and Structured Materials Conference 2021, 1192618 (27 October 2021); https://doi.org/10.1117/12.2616175

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KEYWORDS

Deep ultraviolet

Reflectivity

Reflectors

Aluminum nitride

Polarization

Finite-difference time-domain method

Optical design

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