Improving polymethacrylate EUV resists with TiO2 area-selective deposition

Rachel A. Nye; Kaat Van Dongen; Hironori Oka; Hajime Furutani; Gregory Parsons; Danilo De Simone; Annelies Delabie

doi:10.1117/12.2613815

25 May 2022 Improving polymethacrylate EUV resists with TiO₂ area-selective deposition

Rachel A. Nye, Kaat Van Dongen, Hironori Oka, Hajime Furutani, Gregory Parsons, Danilo De Simone, Annelies Delabie

Proceedings Volume 12055, Advances in Patterning Materials and Processes XXXIX; 120550C (2022) https://doi.org/10.1117/12.2613815
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

Extreme ultraviolet (EUV) lithography is crucial to achieving smaller device sizes for next-generation technology, although organic resists face substantial challenges, such as low etch resistance, which limit the resolution of smaller features. Area-selective deposition (ASD) is one potential avenue to improve pattern resolution from organic EUV resists by selectively depositing material on one region of the resist, while preventing material deposition on an adjacent region. We therefore evaluate the compatibility of various organic EUV resists with area-selective atomic layer deposition (ALD) processes, including considering the effects of photo-acid generator (PAG) and EUV exposure on polymer properties and selectivity. The thermal stability of thin resist materials at the TiO₂ deposition temperature (125°C for 60 minutes) is confirmed with water contact angle and atomic force microscopy. Upon TiO₂ ALD from TiCl₄ and H₂O, Rutherford backscattering spectrometry reveals successful TiO₂ deposition on poly(tert-butyl methacrylate), poly(p-hydroxystyrene), and poly(p-hydroxystyrene-random-methacrylic acid) polymers, regardless of PAG or EUV exposure. However, TiO₂ inhibition is observed on poly(cyclohexyl methacrylate). Thus, we demonstrate that EUV polymers can serve as either the growth or non-growth surface during TiO₂ ASD, an insight that can be used to enable resist hardening and tone inversion applications, respectively. These results serve as a basis for further ASD studies on EUV resist materials to improve pattern resolution in next-generation devices.

Conference Presentation

Citation Download Citation

Rachel A. Nye, Kaat Van Dongen, Hironori Oka, Hajime Furutani, Gregory Parsons, Danilo De Simone, and Annelies Delabie "Improving polymethacrylate EUV resists with TiO₂ area-selective deposition", Proc. SPIE 12055, Advances in Patterning Materials and Processes XXXIX, 120550C (25 May 2022); https://doi.org/10.1117/12.2613815

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