Design of high-density concave variable line space grating based on Lyman ultraviolet

Tao Ren; Keqiang Qiu; Zhengkun Liu; Yilin Hong; Xiangdong Xu; Yanan Wang; Zhiwen Chen

doi:10.1117/12.2606765

24 November 2021 Design of high-density concave variable line space grating based on Lyman ultraviolet

Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Xiangdong Xu, Yanan Wang, Zhiwen Chen

Proceedings Volume 12069, AOPC 2021: Novel Technologies and Instruments for Astronomical Multi-Band Observations; 1206912 (2021) https://doi.org/10.1117/12.2606765
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

In this article, we designed and fabricated a high linear density concave variable line space holographic grating for the Lyman spectrometer, with level 3 working and the center line density is 3300line/mm. The focus curve is a circle with the grating vertex O as the center and a radius of 900 mm. We analyze the influence of the exposure error on the line density distribution and reduce the harm of errors through the method of multi-error compensation. To improve the diffraction efficiency, we use Finite Element Method software to get the best grating groove parameters. Finally, we initially prepared a holographic grating with a symmetrical arch groove with a groove depth of 175nm and a bottom duty cycle of 0.3.

Citation Download Citation

Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Xiangdong Xu, Yanan Wang, and Zhiwen Chen "Design of high-density concave variable line space grating based on Lyman ultraviolet", Proc. SPIE 12069, AOPC 2021: Novel Technologies and Instruments for Astronomical Multi-Band Observations, 1206912 (24 November 2021); https://doi.org/10.1117/12.2606765

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