Dr. Keqiang Qiu Profile

Dr. Keqiang Qiu

at Univ of Science and Technology of China

SPIE Involvement:

Author

Publications (26)

Proceedings Article | 23 December 2023 Paper

Laser damage characteristics and nanosecond laser conditioning of multilayer dielectric gratings for picosecond-petawatt laser systems

Kun Shuai, Xiaofeng Liu, Yuan'an Zhao, Keqiang Qiu, Dawei Li, Xiangkun Lin, He Gong, Jian Sun, Yaping Dai, Jianda Shao

Proceedings Volume 12982, 1298203 (2023) https://doi.org/10.1117/12.3021418

KEYWORDS: Picosecond phenomena, Laser irradiation, Laser induced damage, Pulsed laser operation, Electric fields, Laser systems engineering, Laser damage threshold, Dielectrics, Diffraction gratings, Diffraction

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Proceedings Article | 18 December 2023 Paper

Design of rectangular gold-coated fused silica gratings with high diffraction efficiency for femtosecond pulse compression

Angran Li, Tao Ren, Fanfan Lu, Debo Yuan, Yilin Hong, Keqiang Qiu

Proceedings Volume 12959, 129590X (2023) https://doi.org/10.1117/12.3007758

KEYWORDS: Silica, Diffraction gratings, Diffraction, Coating, Photoresist materials, Optical gratings, Design and modelling, Femtosecond phenomena

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Proceedings Article | 4 April 2023 Paper

Fabrication of deep-etched fused silica grating with high depth-to-width ratio by holograph and ion-beam etching

Manman Sun, Shuhu Huan, Zhiwen Chen, Hengbo Li, Liangcheng Yu, Keqiang Qiu

Proceedings Volume 12617, 1261738 (2023) https://doi.org/10.1117/12.2665859

KEYWORDS: Chromium, Photoresist materials, Photomasks, Diffraction gratings, Holography, Etching, Ion beams, Fabrication, Diffraction, Polarization

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Proceedings Article | 20 January 2023 Paper

Fabrication of linear polarizer in 7-14um infrared region by metal-assisted chemical etching

Fanfan Lu, Huaikun Wei, Angran Li, Tao Ren, Yilin Hong, Keqiang Qiu

Proceedings Volume 12555, 1255508 (2023) https://doi.org/10.1117/12.2648017

KEYWORDS: Silicon, Polarizers, Infrared radiation, Wet etching, Transmittance, Refractive index, Linear polarizers, Aluminum, Silicon films, Metals

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Proceedings Article | 29 August 2022 Presentation + Paper

Design and development of WFOS, the Wide-Field Optical Spectrograph for the Thirty Meter Telescope

Charles Steidel, Eric Peng, Jason Fucik, Reston Nash, Stephen Kaye, George Jacoby, Bernard Delabre, Ramya Sethuram, Devika Divakar, Hari Mohan Varshney, Thirupathi Sivarani, Fumihiro Uraguchi, Shinobu Ozaki, Hangxin Ji, Tao LV, Kent Chiu, Qinfeng Zhu, David Andersen, John Miles, Davide Lasi

Proceedings Volume 12184, 1218423 (2022) https://doi.org/10.1117/12.2629464

KEYWORDS: Cameras, Telescopes, Sensors, Diffraction gratings, Spectrographs, Thirty Meter Telescope, Imaging systems, Mirrors, Collimators, Optical instrument design

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Proceedings Article | 24 November 2021 Paper

High-efficiency visible and near-infrared transmission gratings in fused silica for astronomical ground-based telescope spectrographs

Yanan Wang, Zhiwen Chen, Ruizhi Li, Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Ying Liu

Proceedings Volume 12069, 1206904 (2021) https://doi.org/10.1117/12.2601658

KEYWORDS: Diffraction gratings, Diffraction, Etching, Reactive ion etching, Telescopes, Spectrographs, Silica, Ion beams, Binary data, Holography

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Proceedings Article | 24 November 2021 Paper

Fabrication of UV transmission blazed gratings by holography-ion beam etching

Zhiwen Chen, Yanan Wang, Maoqi Cai, Ruizhi Li, Tao Ren, Keqiang Qiu, Zhengkun Liu, Huoyao Chen, Yilin Hong

Proceedings Volume 12069, 1206911 (2021) https://doi.org/10.1117/12.2606759

KEYWORDS: Etching, Ion beams, Diffraction gratings, Ultraviolet radiation, Holography, Photomasks, Diffraction, Silica, Quartz, Motion models

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Proceedings Article | 24 November 2021 Paper

Design of high-density concave variable line space grating based on Lyman ultraviolet

Tao Ren, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Xiangdong Xu, Yanan Wang, Zhiwen Chen

Proceedings Volume 12069, 1206912 (2021) https://doi.org/10.1117/12.2606765

KEYWORDS: Diffraction gratings, Spectroscopy, Optical design, Holography, Ultraviolet radiation, Error analysis, Diffraction, Holographic interferometry, Polarization, Beam splitters

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Proceedings Article | 12 October 2021 Presentation

Nanosecond laser damage characteristics of multilayer dielectric gratings

Xiangkun Lin, Yuan'an Zhao, Xiaofeng Liu, Dawei Li, Hao Ma, Yuchen Shao, Keqiang Qiu, Jian Sun, Meiping Zhu, Jianda Shao

Proceedings Volume 11910, 1191011 (2021) https://doi.org/10.1117/12.2598669

KEYWORDS: Multilayers, Dielectrics, Laser induced damage, Thermal effects, Silica, Resistance, Raster graphics, Picosecond phenomena, Laser ablation, Etching

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Proceedings Article | 9 August 2021 Paper

Nanosecond laser damage characteristics of multilayer dielectric films and gratings

Xiangkun Lin, Yuan'an Zhao, Xiaofeng Liu, Dawei Li, Hao Ma, Yuchen Shao, Keqiang Qiu, Jian Sun, Fanyu Kong, Meiping Zhu, Jianda Shao

Proceedings Volume 11912, 119120O (2021) https://doi.org/10.1117/12.2602569

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Proceedings Article | 13 December 2020 Presentation + Paper

Mapping diffuse emission in Lyman UV band

Li Ji, Zheng Lou, Jinlong Zhang, Keqiang Qiu, Shuangying Li, Wei Sun, Shuping Yan, Shuinai Zhang, Yuan Qian, Sen Wang, Klaus Werner, Taotao Fang, Tinggui Wang, Jürgen Barnstedt, Sebastian Buntrock, Mingsheng Cai, Wen Chen, Lauro Conti, Lei Deng, Sebastian Diebold, Shaojun Fu, Jianhua Guo, Lars Hanke, Yilin Hong, Christoph Kalkuhl, Norbert Kappelmann, Thomas Kaufmann, Shijun Lei, Fu Li, Xinfeng Li, Wei Liu, Kevin Meyer, Thomas Rauch, Ping Ruan, Daniel Schaadt, Thomas Schanz, Qian Song, Beate Stelzer, Zhanshan Wang, Jianfeng Yang, Wei Zhang

Proceedings Volume 11444, 1144407 (2020) https://doi.org/10.1117/12.2561839

KEYWORDS: Ultraviolet radiation, Imaging systems, Multichannel imaging systems, Optical design, Spectral resolution, Microchannel plates, Sensors, Space operations, Hydrogen, Galactic astronomy

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Proceedings Article | 31 January 2020 Paper

Optical anisotropy of metal nanowire arrays on fused silica surface

Yuheng Chen, Maoqi Cai, Keqiang Qiu, Yilin Hong

Proceedings Volume 11427, 114271N (2020) https://doi.org/10.1117/12.2551664

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Proceedings Article | 31 January 2020 Paper

High line density fused silica transmission gratings by deep reactive ion beam etching for ultra-short pulse laser compression

Yanan Wang, Zhiwen Chen, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Xiangdong Xu

Proceedings Volume 11427, 114271U (2020) https://doi.org/10.1117/12.2551974

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Proceedings Article | 31 January 2020 Paper

Design of near-infrared resonance antenna array filters in termophotovoltaic application

Maoqi Cai, Zhiwen Chen, Yuheng Chen, Keqiang Qiu, Xiangdong Xu, Yilin Hong

Proceedings Volume 11427, 114274E (2020) https://doi.org/10.1117/12.2553233

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Proceedings Article | 18 November 2019 Paper

A new method for non-destructive measuring of grating parameters

Bilali Muhutijiang, Wei Wei, Keqiang Qiu

Proceedings Volume 11188, 1118825 (2019) https://doi.org/10.1117/12.2537840

KEYWORDS: Diffraction gratings, Scanning electron microscopy, Diffraction, Nondestructive evaluation, Atomic force microscopy, Data modeling, Distance measurement, Microscopes, Physics, Electronics engineering

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Proceedings Article | 31 October 2016 Paper

Design of soft x-ray varied-line-spacing grating based on electron beam lithography-near field lithography

Dakui Lin, Huoyao Chen, Stefanie Kroker, Thomas Käsebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 10022, 100220S (2016) https://doi.org/10.1117/12.2246356

KEYWORDS: Lithography, X-rays, Silica, Photomasks, X-ray lithography, Electron beam lithography, Optical design, Electron beams, Photoresist materials, Diffraction

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Proceedings Article | 31 October 2016 Paper

Improve the diffraction efficiency of the multilayer dielectric gratings

Bilali Muhutijiang, Keqiang Qiu, Taximaiti Yusufu

Proceedings Volume 10022, 100221U (2016) https://doi.org/10.1117/12.2245670

KEYWORDS: Diffraction gratings, Diffraction, Photoresist materials, Etching, Dielectrics, Ion beams, Oxygen, Scanning electron microscopy, Holography, Photomasks

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Proceedings Article | 31 October 2016 Paper

Anti-reflective sub-wavelength structures at a wavelength of 441.6 nm for phase masks of near-field lithography

Jinyu Li, Huoyao Chen, Stefanie Kroker, Thomas Käsebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 10022, 100220T (2016) https://doi.org/10.1117/12.2246381

KEYWORDS: Electron beam lithography, Antireflective coatings, Lithography, Near field, Photomasks, Interfaces, Reflectivity, Glasses, Diffraction, Stray light

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Proceedings Article | 28 October 2016 Paper

Method for ion beam etching in angles with multi-layers model

Siwei Zeng, Lixiang Wu, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 9683, 96830L (2016) https://doi.org/10.1117/12.2242280

KEYWORDS: Etching, Ion beams, Photoresist materials, Diffraction gratings, Monte Carlo methods, Sputter deposition, Lithium, Quartz, Ions, Chemical species

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SPIE Journal Paper | 20 October 2015

Design and fabrication of sine-top broadband gold-coated gratings

Bilali Muhutijiang, Keqiang Qiu, Xiaolong Jiang, Shaojun Fu

OE, Vol. 54, Issue 10, 105109, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.105109

KEYWORDS: Diffraction, Diffraction gratings, Photoresist materials, Gold, Optical design, Etching, Quartz, Photomasks, Photoresist developing, Ion beams

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Proceedings Article | 17 April 2015 Paper

Fabrication of sine-top broadband gold-coated gratings

Bilali Muhutijiang, Keqiang Qiu, Yanchang Zheng, Xiaolong Jiang, Yilin Hong

Proceedings Volume 9374, 937418 (2015) https://doi.org/10.1117/12.2075013

KEYWORDS: Diffraction gratings, Diffraction, Photoresist materials, Photoresist developing, Silica, Etching, Laser damage threshold, Photomasks, Gold, Ion beams

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Proceedings Article | 13 March 2015 Paper

Finely control groove-depth variations of large-area diffraction gratings

Lixiang Wu, Keqiang Qiu, Xiaolong Jiang, Yanchang Zheng, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 9374, 937411 (2015) https://doi.org/10.1117/12.2077396

KEYWORDS: Etching, Ion beams, Raster graphics, Ions, Diffraction gratings, Optical components, Algorithm development, Vacuum ultraviolet, Synchrotron radiation, Synchrotron technology

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Proceedings Article | 28 August 2014 Paper

Fabrication of high aspect ratio silicon gratings by interference lithography and potassium hydroxide anisotropic etch technique

Yanchang Zheng, Keqiang Qiu, Xiaolong Jiang, Qingbo Wang, Lixiang Wu, Lali Bi, Yilin Hong

Proceedings Volume 9170, 917018 (2014) https://doi.org/10.1117/12.2058669

KEYWORDS: Etching, Silicon, Anisotropic etching, Lithography, Fabrication, Semiconducting wafers, Potassium, Photoresist materials, Aluminum, Optical alignment

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Proceedings Article | 15 October 2012 Paper

Fabrication of a new type of transmission grating with holography interferometry and wet anisotropic etching

Yong Chen, Keqiang Qiu, Xiangdong Xu, Yilin Hong, Zhenkun Liu, Ying Liu, Shaojun Fu

Proceedings Volume 8418, 84180O (2012) https://doi.org/10.1117/12.971424

KEYWORDS: Diffraction gratings, Photomasks, Silicon, Holography, Etching, Diffraction, Wet etching, Lithography, Optical alignment, Interferometry

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Proceedings Article | 4 January 2008 Paper

Methods of controlling grooves profile and the duty cycle of gold transmission phase gratings

Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6832, 68322L (2008) https://doi.org/10.1117/12.757521

KEYWORDS: Gold, Photoresist materials, Photoresist developing, Ion beams, Chromium, Etching, Reflectivity, Holography, Diffraction gratings, Semiconducting wafers

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Proceedings Article | 14 November 2007 Paper

Design and fabrication of soft x-ray transmission phase gratings

Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6722, 67223R (2007) https://doi.org/10.1117/12.783542

KEYWORDS: Diffraction gratings, Diffraction, Gold, X-rays, Optical design, Ion beams, Etching, Interferometers, Holography, Synchrotron radiation

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Showing 5 of 26 publications

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