Development of chirp reduction technique for spherical beams interference lithography

Ratish Rao Nagaraj Rao; Thomas Kämpfe; Frederic Celle; Anton Savchenko; Emilie Gamet; Yves Jourlin

doi:10.1117/12.2621360

24 May 2022 Development of chirp reduction technique for spherical beams interference lithography

Ratish Rao Nagaraj Rao, Thomas Kämpfe, Frederic Celle, Anton Savchenko, Emilie Gamet, Yves Jourlin

Proceedings Volume 12131, Nanophotonics IX; 121310T (2022) https://doi.org/10.1117/12.2621360
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Conference Poster

Abstract

This work improves period uniformity over larger-area gratings in a two-spherical beam interference lithography (IL) setup. Using a concave vacuum chuck, we have experimentally demonstrated the modified optical setup to reduce period variation (chirp) on a 4-inch silicon substrate. The change in the grating period is significantly reduced compared with the interference exposure on a flat silicon substrate. Wavefront aberration measurement on a curved exposed substrate showed improved grating linearity.

Citation Download Citation

Ratish Rao Nagaraj Rao, Thomas Kämpfe, Frederic Celle, Anton Savchenko, Emilie Gamet, and Yves Jourlin "Development of chirp reduction technique for spherical beams interference lithography", Proc. SPIE 12131, Nanophotonics IX, 121310T (24 May 2022); https://doi.org/10.1117/12.2621360

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available