Research on a natural gas flow sensor based on MEMS technology

Jie Zhang; Shaohua Sun; Fuzhong Zheng; Shan Wang; Ying Wu; Qiang Cao

doi:10.1117/12.2688770

18 July 2023 Research on a natural gas flow sensor based on MEMS technology

Jie Zhang, Shaohua Sun, Fuzhong Zheng, Shan Wang, Ying Wu, Qiang Cao

Proceedings Volume 12744, Second International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2023); 127442J (2023) https://doi.org/10.1117/12.2688770
Event: Second International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2023), 2023, Nanjing, China

Abstract

The primary task of establishing an intelligent energy network is to achieve the intelligent measurement of energy sources such as water, electricity, and natural gas, etc. Among them, significant progress has been made in the intelligent measurement of electricity and water, but the intelligent measurement of natural gas is still an urgent technical problem to be solved. At present, the actually used gas flow meters in the market are still traditional mechanical gas meters, which require manually recording gas meter data in each household. The data cannot be connected to the internet and cannot collect instantaneous flow values in real time, which is not conducive to real-time peak shaving of the energy network and compatibility with national intelligent energy network projects. The MEMS gas flow sensor studied in this article has the advantages of small size, light weight, low power consumption, high reliability, high sensitivity, and easy integration, which is a highly promising technical means to solve the intelligent measurement of natural gas.

Citation Download Citation

Jie Zhang, Shaohua Sun, Fuzhong Zheng, Shan Wang, Ying Wu, and Qiang Cao "Research on a natural gas flow sensor based on MEMS technology", Proc. SPIE 12744, Second International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2023), 127442J (18 July 2023); https://doi.org/10.1117/12.2688770

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