Femtosecond laser processing of silicon in liquid: diverse nanomorphologies and applications

Yulia M. Borodaenko; Stanislav O. Gurbatov; Svetlana N. Khonina; Evgeny E. Gurevich; Aleksandr A. Kuchmizhak

doi:10.1117/12.2689047

27 November 2023 Femtosecond laser processing of silicon in liquid: diverse nanomorphologies and applications

Yulia M. Borodaenko, Stanislav O. Gurbatov, Svetlana N. Khonina, Evgeny E. Gurevich, Aleksandr A. Kuchmizhak

Proceedings Volume 12762, Advanced Laser Processing and Manufacturing VII; 127620R (2023) https://doi.org/10.1117/12.2689047
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

In this work, the effects of direct femtosecond laser nanostructuring on monocrystalline silicon (Si) wafer immersed in liquid environment were studied. Ultrashort laser exposure induced nonequilibrium states in materials triggers the morphology self- organization driven by excited electromagnetic and hydrodynamic processes, which ultimately give rise to the formation of regular nanogratings with different periodicity (Λ₁=250 nm to 300 nm, Λ₂=70±10 nm) and randomly arranged spike structures. The type of the nanotextures can be controlled by varying the laser fluence and polarization distribution of the incident laser beam studied for the cases of linearly/circularly polarized Gaussian laser beams as well as azimuthally polarized cylindrical vector beam. Through laser-induced interface chemical reactions stimulated by adding the appropriate salt/acid/molecular precursors in the process of liquid-phase Si texturing, it becomes possible to functionalize the obtained nanotextures with mono- and multi-metallic nanoparticels and/or photoluminescent chemosensing molecular probes. Adjusting laser processing parameters and component functionalizing solutions has providing a flexible approach for large-scale manufacturing that can be realized for diverse applications such as light harvesting, chemosensing, optical detection, heterogeneous catalysis and microfluidics.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Yulia M. Borodaenko, Stanislav O. Gurbatov, Svetlana N. Khonina, Evgeny E. Gurevich, and Aleksandr A. Kuchmizhak "Femtosecond laser processing of silicon in liquid: diverse nanomorphologies and applications", Proc. SPIE 12762, Advanced Laser Processing and Manufacturing VII, 127620R (27 November 2023); https://doi.org/10.1117/12.2689047

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KEYWORDS

Silicon

Polarization

Laser processing

Liquids

Laser irradiation

Nanoparticles

Laser ablation

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