Micro-optical setup with microlenses and microprisms based on refractive optics

Karl-Heinz Brenner; Michael Frank; Maria Kufner; Stefan Kufner; Joerg Moisel; A. Mueller; Stefan Sinzinger; Markus E. Testorf; Jost Goettert; Juergen Mohr

doi:10.1117/12.147834

12 July 1993 Micro-optical setup with microlenses and microprisms based on refractive optics

Karl-Heinz Brenner, Michael Frank, Maria Kufner, Stefan Kufner, Joerg Moisel, A. Mueller, Stefan Sinzinger, Markus E. Testorf, Jost Goettert, Juergen Mohr

Author Affiliations +

Proceedings Volume 1806, Optical Computing; (1993) https://doi.org/10.1117/12.147834
Event: Topical Meeting on Optical Computing, 1992, Minsk, Belarus

Abstract

Deep etch lithography of PMMA by the LIGA-technique or H⁺ lithography is a powerful tool for the fabrication of very high refractive microprisms. We have realized a microintegrated optical imaging system using microprisms fabricated by the LIGA-process and microlenses with a diameter of 250 micrometers . Thus the size of the imaging system is less than 2 mm⁺.

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Karl-Heinz Brenner, Michael Frank, Maria Kufner, Stefan Kufner, Joerg Moisel, A. Mueller, Stefan Sinzinger, Markus E. Testorf, Jost Goettert, and Juergen Mohr "Micro-optical setup with microlenses and microprisms based on refractive optics", Proc. SPIE 1806, Optical Computing, (12 July 1993); https://doi.org/10.1117/12.147834

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