Paper
15 September 1995 Biodriven microsystem for treatment of hydrocephalus
Jurgen Joswig, Jens Oswald, Steffen Seifert
Author Affiliations +
Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221180
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States
Abstract
A microvalve system made of silicon for use in hydrocephalus therapy is presented, which will provide an excellent intracranial pressure stabilization. Design and processing are described. Testing results (in vitro) are presented.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jurgen Joswig, Jens Oswald, and Steffen Seifert "Biodriven microsystem for treatment of hydrocephalus", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221180
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Silicon

Sensors

Actuators

Brain

Microsystems

In vitro testing

Oxides

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