Graded-index films using aluminum oxynitrides

Francis Placido; John Russell; Zhenhui Gou

doi:10.1117/12.246822

19 August 1996 Graded-index films using aluminum oxynitrides

Francis Placido, John Russell, Zhenhui Gou

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246822
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

High quality coatings of aluminium oxynitrides have been deposited by reactive RF sputtering of aluminium in argon/oxygen/nitrogen atmospheres. Graded-index films in which the refractive index changes continuously with thickness over the range 1.6-2.0 have been produced by varying the oxygen and nitrogen content of the growing film. Computer control of the gas flow rates has allowed the reproducible production of laser rejection filters having optical densities greater than 4 and rejection wavelengths which can be chosen from < 300 to > 1100 nm. Scanning electron microscopy has shown that films when broken, tend to fracture preferentially at one particular composition. Depth profiling chemical analysis of the films has been carried our using x-ray photoelectron spectroscopy, showing clearly that the desired sinusoidal composition variations with depth has been achieved in these films.

Citation Download Citation

Francis Placido, John Russell, and Zhenhui Gou "Graded-index films using aluminum oxynitrides", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246822

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available