Analysis of nonlinear overlay errors by aperture mixing related with pattern asymmetry

Chang-Moon Lim; Ki-Sung Kwon; Donggyu Yim; Dong-Hwan Son; Hyeong-Soo Kim; Ki-Ho Baik

doi:10.1117/12.276014

7 July 1997 Analysis of nonlinear overlay errors by aperture mixing related with pattern asymmetry

Chang-Moon Lim, Ki-Sung Kwon, Donggyu Yim, Dong-Hwan Son, Hyeong-Soo Kim, Ki-Ho Baik

Proceedings Volume 3051, Optical Microlithography X; (1997) https://doi.org/10.1117/12.276014
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

Modified illumination scheme such as off-axis illumination or low partial coherence illumination in combination with phase shift mask is very reliable technique even to the manufacturing stage. In spite of its benefit of drastic improvements in resolution and depth of focus, it has several well known drawbacks. Those are pattern structure dependency, increased proximity effect and significant degradation of illumination power. Furthermore, several studies are reported about the distortion-like registration error between each illumination aperture while various apertures are mix-used. However, the origin of this distortion-like overlay errors is still uncertain and just considered as having some relationship with lens aberration probably, coma. In this study, we investigated the nonlinear character of the registration errors and try to find out the implicit relations of its to the lens aberration character through experiments and simulations.

Citation Download Citation

Chang-Moon Lim, Ki-Sung Kwon, Donggyu Yim, Dong-Hwan Son, Hyeong-Soo Kim, and Ki-Ho Baik "Analysis of nonlinear overlay errors by aperture mixing related with pattern asymmetry", Proc. SPIE 3051, Optical Microlithography X, (7 July 1997); https://doi.org/10.1117/12.276014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available