Grating diffraction for strain measurement in a microscope

Bing Zhao; Anand Krishna Asundi

doi:10.1117/12.323364

29 September 1998 Grating diffraction for strain measurement in a microscope

Bing Zhao, Anand Krishna Asundi

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323364
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

In this paper, a compact microscope system for direct strain measurement is presented. It involves the grating diffraction method coupled with microscopy and image processing technique. A Leitz optical transmitting microscope with white light source is reconstructed by developing a loading and recording system. Gratings with median density from 40 - 200 l/mm are used. With the help of a Bertrand lens, the Fourier spectrum of the grating, not the grating image is formed on the CCD sensor plane with high image quality. A software which can precisely, quickly and automatically determine the diffraction spot centroids is developed. The local strain is measured with high spatial resolution. A discussion on improving the sensitivity in multiple ways is suggested.

Citation Download Citation

Bing Zhao and Anand Krishna Asundi "Grating diffraction for strain measurement in a microscope", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323364

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KEYWORDS

Diffraction gratings

Diffraction

Microscopes

Image quality

Image processing

Spatial resolution

CCD image sensors

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