CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 4334 > Article
Open Access Paper
16 August 2001 MEMS for high-frequency applications
Jung-Chih Chiao
Author Affiliations +
Proceedings Volume 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS; (2001) https://doi.org/10.1117/12.436599
Event: SPIE's 8th Annual International Symposium on Smart Structures and Materials, 2001, Newport Beach, CA, United States
Abstract
In this paper, we reviewed some of the microelectromechanical system (MEMS) research efforts for high frequency applications. The efforts can generally be divided into two areas: planar reconfigurable transceivers and phased arrays using MEMS devices. For the planar transceivers, the interest is in demonstration of RF MEMS devices with a focus on integration issues including architectures and fabrication. Our goal is to establish building blocks for compact, smart transceivers that have beam forming and tuning functionality. For phased-array applications, system architectures were demonstrated for quasi-optical systems and phased arrays. The purpose is to demonstrate beam forming and steering functionality using MEMS devices instead of expensive phase shifters.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Jung-Chih Chiao "MEMS for high-frequency applications", Proc. SPIE 4334, Smart Structures and Materials 2001: Smart Electronics and MEMS, (16 August 2001); https://doi.org/10.1117/12.436599
PROCEEDINGS
 10 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Lens.org Logo
CITATIONS
Cited by 2 patents.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Microelectromechanical systems
Switches
Antennas
Metals
Phase shifts
Transceivers
Electronics
RELATED CONTENT
Optimally curved electrodes for a rotary microactuator
Proceedings of SPIE (June 21 2000)
Reflectarray for 120 GHz beam steering application design, simulations,...
Proceedings of SPIE (May 08 2012)
VIACT (versatile integrated actuator) multitasking planar microrobot
Proceedings of SPIE (July 22 2003)
Lifetime characteristics of ohmic MEMS switches
Proceedings of SPIE (December 23 2003)
System in package LTCC platform for 3D RF to millimeter...
Proceedings of SPIE (April 15 2011)
MEMS millimeter-wave transceiver architectures
Proceedings of SPIE (August 31 1999)
MEMS millimeter-wave reconfigurable components
Proceedings of SPIE (November 12 1999)
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top