Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography

HongJin Jiang; XiaoCong Yuan; Wai Chye Cheong

doi:10.1117/12.446535

29 October 2001 Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography

HongJin Jiang, XiaoCong Yuan, Wai Chye Cheong

Proceedings Volume 4594, Design, Fabrication, and Characterization of Photonic Devices II; (2001) https://doi.org/10.1117/12.446535
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

An electron-beam sensitive inorganic-organic hybrid SiO₂TiO₂ glass was synthesized for the fabrication of structures with sub-micron sized features. The sensitivity of the sol-gel material was characterized with the electron beam dosage and the optimized doses were found to cross-link the material for sub-micron structures. Due to its properties of low thermal expansion, good mechanical strength and chemical durability, the sol-gel material can be used as resistance in the dry etching process in optoelectronics fabrications. For micro-optical elements, the diffractive optical elements can be fabricated directly into the sol-gel glass without etching.

Citation Download Citation

HongJin Jiang, XiaoCong Yuan, and Wai Chye Cheong "Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography", Proc. SPIE 4594, Design, Fabrication, and Characterization of Photonic Devices II, (29 October 2001); https://doi.org/10.1117/12.446535

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available