DEM microfabrication technique and its applications in bioscience and microfluidic systems

Di Chen; Fan Yang; Min Tang; Yigui Li; Jun Zhu; Dacheng Zhang

doi:10.1117/12.444704

15 October 2001 DEM microfabrication technique and its applications in bioscience and microfluidic systems

Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, Dacheng Zhang

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444704
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

A new LIGA-like microfabrication technique was developed by present authors. DEM (deepetching, electroforming and microreplication) is the abbreviation of three main process steps in this new microfabrication technique. In contrast to LIGA technique, DEM technique has the advantages of lower cost and shorter process period. Microfluidic systems like plastic capillary electrophoresis chips, micro flowmeters and three-dimensional DNA chips were developed using DEM technique. DEM technique offers a new way for fabrication of MEMS and MOEMS components.

Citation Download Citation

Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, and Dacheng Zhang "DEM microfabrication technique and its applications in bioscience and microfluidic systems", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444704

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