Flare and its impact on low-k1 KrF and ArF lithography

Bruno M. La Fontaine; Mircea V. Dusa; Alden Acheta; Cinti Chen; Anatoly Bourov; Harry J. Levinson; Lloyd C. Litt; Melchior Mulder; Rolf Seltman; Judith van Praagh

doi:10.1117/12.474598

30 July 2002 Flare and its impact on low-k₁ KrF and ArF lithography

Bruno M. La Fontaine, Mircea V. Dusa, Alden Acheta, Cinti Chen, Anatoly Bourov, Harry J. Levinson, Lloyd C. Litt, Melchior Mulder, Rolf Seltman, Judith van Praagh

Author Affiliations +

Proceedings Volume 4691, Optical Microlithography XV; (2002) https://doi.org/10.1117/12.474598
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

We present a complete method for the characterization and modeling of flare based on the measurement of the modulation transfer function (MTF) of scanners. A point-spread function (PSF_scat) representing only the scattered light or flare in the tool is inferred by comparing the measured MTF with a calculated MTF for aberration-free imaging. This PSF_scat is then used to predict the effect of flare for different layouts. In particular, local variations in pattern density are shown to couple with mid- and short-range flare and lead to significant CD non-uniformity across the field. Finally, we examine double exposure techniques that are sensitive to flare because of the total light reaching the wafer, from the two masking steps.

Citation Download Citation

Bruno M. La Fontaine, Mircea V. Dusa, Alden Acheta, Cinti Chen, Anatoly Bourov, Harry J. Levinson, Lloyd C. Litt, Melchior Mulder, Rolf Seltman, and Judith van Praagh "Flare and its impact on low-k₁ KrF and ArF lithography", Proc. SPIE 4691, Optical Microlithography XV, (30 July 2002); https://doi.org/10.1117/12.474598

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available