Phase-matching pseudo-resonant tunable InP-based MOEMS

Dan Zhou; K. Sun; Michel Garrigues; Jean Louis Leclercq; Philippe Regreny; Jiangde Peng; Pierre Viktorovitch

doi:10.1117/12.462844

19 April 2002 Phase-matching pseudo-resonant tunable InP-based MOEMS

Dan Zhou, K. Sun, Michel Garrigues, Jean Louis Leclercq, Philippe Regreny, Jiangde Peng, Pierre Viktorovitch

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462844
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

In this paper, we present a new concept of tunable active Micro-Opto-Electro-Mechanical System (MOEMS) microdevice for specific applications in the 1.3-2.5 micrometers wavelength range such as near infrared spectroscopy or optical telecommunications. The proposed optical structure can be used for the realization of tunable wavelength selective devices (photodetectors or emitters). The device uses a radically new optical design which separates the detector (or emitter) from the filter but place it on top of the filter. As compared to the existing micro-mechanical tunable devices, this concept does present two main advantages such as the improvement of the optical spectral response (forward and backward traveling of the optical waves through the active part) and relaxation of the technological constraints for fabrication (planar monolithic integration of the active component with post-process micromachining). We present here the design, the optical simulations and the fabrication procedure of a first demonstrator consisting in an optically pumped wavelength selective and tunable light emitting diode. The gain active region comprises InAs quantum wires designed for light emission aro7und 1500 nm. The MOEM structure is made of InP/air gap layers. We have obtained an increase of the spontaneous emission by a factor of about 40 and tuning range about 60 nm for actuation voltages up to 15 V.

Citation Download Citation

Dan Zhou, K. Sun, Michel Garrigues, Jean Louis Leclercq, Philippe Regreny, Jiangde Peng, and Pierre Viktorovitch "Phase-matching pseudo-resonant tunable InP-based MOEMS", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462844

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KEYWORDS

Mirrors

Absorption

Sensors

Microopto electromechanical systems

Optical design

Optical filters

Photodetectors

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