Dr. Jean Louis Leclercq Profile

Dr. Jean Louis Leclercq

Senior Researcher CNRS at Ecole Centrale de Lyon

SPIE Involvement:

Author

Publications (36)

Proceedings Article | 1 May 2023 Presentation + Paper

Presentation + Paper

Chitosan as a water-based photoresist for DUV lithography

Isabelle Servin, Alexandre Teolis, Arnaud Bazin, Aurélien Sarrazin, Paule Durin, Olha Sysova, Corinne Gablin, Benoît Saudet, Didier Leonard, Olivier Soppera, Jean-Louis Leclercq, Yann Chevolot, Raluca Tiron, Thierry Delair, Stephane Trombotto

Proceedings Volume 12498, 1249818 (2023) https://doi.org/10.1117/12.2658423

KEYWORDS: Semiconducting wafers, Silicon, Deep ultraviolet, Lithography, Photoacid generators, Photoresist processing, Plasma etching, Etching, Optical lithography, Film thickness, Sustainability

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Proceedings Article | 20 March 2018 Presentation + Paper

Presentation + Paper

Sub-micron lines patterning into silica using water developable chitosan bioresist films for eco-friendly positive tone e-beam and UV lithography

Mathieu Caillau, Céline Chevalier, Pierre Crémillieu, Thierry Delair, Olivier Soppera, Benjamin Leuschel, Cédric Ray, Christophe Moulin, Christian Jonin, Emmanuel Benichou, Pierre-François Brevet, Christelle Yeromonahos, Emmanuelle Laurenceau, Yann Chevolot, Jean-Louis Leclercq

Proceedings Volume 10587, 105870S (2018) https://doi.org/10.1117/12.2292312

KEYWORDS: Biopolymers, Electron beam lithography, Lithography, Optical lithography, Silicon, Silica, Etching, Absorbance, Polymers, Ultraviolet radiation, Polymethylmethacrylate

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Proceedings Article | 28 April 2017 Presentation

Presentation

High-index dielectric optical metasurface with broken vertical symmetry (Conference Presentation)

Pierre Viktorovitch, Florian Dubois, Thierry Deschamps, Hai Son Nguyen, Xavier Letartre, Jean-Louis Leclercq, Christian Seassal

Proceedings Volume 10113, 1011303 (2017) https://doi.org/10.1117/12.2255617

KEYWORDS: Dielectrics, Photonic crystals, Thin films, Reflection, Plasmonics, Dielectric polarization, Energy efficiency, Dispersion, Nanotechnology, Current controlled current source

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The seminal work of R.B. Wood (1902), who discovered anomalies in the reflection spectra of sub-wavelength metallic gratings, triggered the field of plasmonics, where ultra-thin metallic sheets laterally structured on a sub-wavelength scale, so called metallic meta-surface, are under operation. The goal of the field has extended considerably in the last decades and has aimed at arbitrary control over the amplitude, phase and polarization… of light waves at the sub-wavelength scale. All-dielectric meta-surfaces consisting in nano-structured thin films of high index dielectric material, are attracting much attention, owing to their capability to achieve the same goal as their metallic counterpart, yet with an enhanced efficiency (especially for the manipulation of strong optical resonances), being freed from significant energy dissipation as encountered in metallic nano-structures. All dielectric meta-surfaces have been around for quite a while, but were named differently (photonic crystal dielectric membranes or high index contrast gratings). Unless rare exceptions, the literature reports on structures with non-broken vertical symmetry. In the present contribution we emphasize that breaking the vertical symmetry of all-dielectric meta-surfaces provides a widely enhanced degree of freedom for the control of spatial routes and spectral characteristics of light, which depends, to an essential extent, on the local density of photonic states in the thin nano-structured dielectric film. As an enlightening illustration, we concentrate on a dielectric meta-surface formed by two super-imposed identical evanescently coupled gratings, with adjustable gap distance and lateral alignment. We show that this remarkably simple meta-surface can provide any local density of photonic states from zero (Dirac cone) to infinity (ultra-flat zero curvature dispersion characteristics), as well as any constant density over an adjustable spectral range. Exemplifying applications will illustrate the great potential of this new approach.

Proceedings Article | 26 July 2016 Presentation

Presentation

Tight control of light trapping in surface addressable photonic crystal membranes: application to spectrally and spatially selective optical devices (Conference Presentation)

Xavier Letartre, Cédric Blanchard, Christian Grillet, Cécile Jamois, Jean-Louis Leclercq, Pierre Viktorovitch

Proceedings Volume 9885, 98850P (2016) https://doi.org/10.1117/12.2227526

KEYWORDS: Photonic crystals, Optical components, Waveguides, Reflection, Photonic devices, Control systems, Photons, Mirrors, Optical microcavities, Dielectric polarization, Vertical cavity surface emitting lasers

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Proceedings Article | 15 March 2016 Paper

Paper

Widened photonic functionality of asymmetric high-index contrast/photonic crystal gratings

Hai Son Nguyen, Florian Dubois, Xavier Letartre, Jean-Louis Leclercq, Christian Seassal, Pierre Viktorovitch

Proceedings Volume 9757, 975703 (2016) https://doi.org/10.1117/12.2208654

KEYWORDS: Dispersion, Crystals, Nonlinear crystals, Silicon, Charged particle optics, Solar cells, Photons, Reflectors, Reflectivity, Vertical cavity surface emitting lasers

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Proceedings Article | 1 June 2015 Paper

Paper

Self-assembly 'micro-origami' photon cages as hollow micro-resonators

A. Danescu, C. Chevalier, R. Artinyan, P. Regreny, G. Grenet, S. Callard, P. Rojo-Romeo, X. Letartre, J. L. Leclercq

Proceedings Volume 9520, 95200O (2015) https://doi.org/10.1117/12.2178486

KEYWORDS: Spherical lenses, Photonic crystals, Resonators, Etching, Photomasks, Photonic microstructures, 3D microstructuring, Microresonators, Optical proximity correction, 3D acquisition

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Proceedings Article | 26 March 2015 Paper

Paper

Perturbation model for the control of the spectral properties of high contrast gratings

Cédric Blanchard, Cécile Jamois, Pierre Viktorovitch, Christian Grillet, Jean-Louis Leclercq, Taha Benyattou, Xavier Letartre

Proceedings Volume 9372, 93720V (2015) https://doi.org/10.1117/12.2076595

KEYWORDS: Solar energy, Waveguides, Dispersion, Atmospheric modeling, Photonic crystals, Nanophotonics, Wave propagation, Nanotechnology, Solar cells, Control systems

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Proceedings Article | 8 February 2015 Paper

Paper

Mid-IR integrated photonics for sensing applications

L. Carletti, C. Monat, R. Orobtchouk, P. Rojo-Romeo, Zhen Lin, Cecile Jamois, J.-L. Leclerc, P. Viktorovitch, X. Letartre, C. Grillet

Proceedings Volume 9370, 93701J (2015) https://doi.org/10.1117/12.2083769

KEYWORDS: Mid-IR, Waveguides, Vertical cavity surface emitting lasers, Silicon, Absorption, Reflectors, Integrated photonics, Sensors, Silicon photonics, Semiconductor lasers

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Proceedings Article | 2 May 2014 Paper

Paper

Optical characterization of active photon cages

R. Artinyan, A. Benamrouche, C. Belacel, M. Kozubova, A. Berthelot, A.M. Jurdyc, G. Beaudin, V. Aimez, P. Rojo-Romeo, J.L. Leclercq, R. Peretti, X. Letartre, S. Callard

Proceedings Volume 9127, 91270K (2014) https://doi.org/10.1117/12.2052292

KEYWORDS: Lead, Quantum dots, Photonic crystals, Luminescence, Reflectivity, Resonators, Active optics, Liquids, Optical microcavities, Mirrors

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Proceedings Article | 25 April 2012 Paper

Paper

3D optical micro-resonators by curving nanostructures using intrinsic stress

C. Sieutat, C. Chevalier, A. Danescu, G. Grenet, P. Regreny, P. Viktorovitch, X. Letartre, J. Leclercq

Proceedings Volume 8425, 842519 (2012) https://doi.org/10.1117/12.922375

KEYWORDS: Photons, 3D microstructuring, Spherical lenses, Photonic crystals, Optical microcavities, Microresonators, Etching, Geometrical optics, Photomasks, Electromagnetism

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Proceedings Article | 25 April 2012 Paper

Paper

Dual-wavelength laser for THz generation by photo-mixing

K. Kusiaku, J. Leclercq, P. Regreny, P. Rojo-Romeo, C. Seassal, P. Viktorovitch, X. Letartre, L. Chusseau, F. Disanto, F. Philippe, E. Augendre

Proceedings Volume 8425, 84250H (2012) https://doi.org/10.1117/12.922505

KEYWORDS: Reflectivity, Terahertz radiation, Semiconductor lasers, Quantum wells, Photonic crystals, Silica, Luminescence, Resonators, Reflectors, Mirrors

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Proceedings Article | 5 June 2010 Paper

Paper

Multi-resonant microresonators for optical frequency conversion

K. Kusiaku, X. Letartre, J. Leclercq, P. Rojo-Romeo, C. Seassal, P. Viktorovitch

Proceedings Volume 7728, 77280K (2010) https://doi.org/10.1117/12.854523

KEYWORDS: Silica, Mirrors, Optical microcavities, Terahertz radiation, Quantum wells, Reflectors, Photonic crystals, Nonlinear optics, Photons, Microresonators

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Proceedings Article | 11 May 2010 Paper

Paper

3D harnessing of light with photon cage

C. Sieutat, J. L. Leclercq, X. Letartre, S. Callard, M. Gendry, G. Grenet, K. Naji, P. Regreny, P. Rojo-Romeo, P. Viktorovitch, G. Beaudin, M. Cloutier, D. Drouin, V. Aimez

Proceedings Volume 7712, 77120E (2010) https://doi.org/10.1117/12.854428

KEYWORDS: Optical microcavities, Photonic crystals, Waveguides, Nanophotonics, Silicon, Reflectivity, Nanotechnology, Waveguide modes, Mirrors, Nanowires

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Proceedings Article | 6 May 2008 Paper

Paper

Control of mode volume and radiation dynamics of a slow-light-mode in a quasi-3D photonic crystal configuration

Badhise Ben Bakir, Salim Boutami, Christian Seassal, Xavier Letartre, Jean-Louis Leclercq, Pierre Viktorovitch, Marc Zussy, Lea Di Cioccio, Jean Marc Fedeli

Proceedings Volume 6989, 69890M (2008) https://doi.org/10.1117/12.781254

KEYWORDS: Reflectors, Photonic crystals, Silicon, Reflectivity, Finite-difference time-domain method, Resonators, Mirrors, Heterojunctions, Polarization, Modulation

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Proceedings Article | 6 May 2008 Paper

Paper

Photonic crystal slab mirrors for an ultimate vertical and lateral confinement of light in vertical Fabry Perot cavities

S. Boutami, B. Ben Bakir, X. Letartre, J. L. Leclercq, P. Viktorovitch

Proceedings Volume 6989, 69890V (2008) https://doi.org/10.1117/12.781233

KEYWORDS: Mirrors, Photons, Reflectivity, Photonic crystals, Dispersion, Phase shifts, Crystals, Vertical cavity surface emitting lasers, Fabry–Perot interferometers, Imaging devices

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Proceedings Article | 7 March 2007 Paper

Paper

Photonic crystal slab reflectors for compact passive and active optical devices

S. Boutami, B. Benbakir, J. L. Leclercq, X. Letartre, P. Regreny, M. Garrigues, P. Viktorovitch, L. Legratiet, G. Beaudoin, I. Sagnes

Proceedings Volume 6475, 647512 (2007) https://doi.org/10.1117/12.700357

KEYWORDS: Reflectors, Reflectivity, Photonic crystals, Mirrors, Optical filters, Electronic filtering, Microopto electromechanical systems, Fabry–Perot interferometers, Photons, Waveguides

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Proceedings Article | 22 January 2007 Paper

Paper

An indium phosphide-based near-infrared MOEMS microspectrometer for agri-food and environmental monitoring

Michel Garrigues, J. Leclercq, Romain Gil-Sobraqués, Olivier Parillaud, Michel Crochon, Jean-Michel Roger, Octave Amore, Bruno Vilotitch

Proceedings Volume 6466, 646607 (2007) https://doi.org/10.1117/12.700256

KEYWORDS: Quantum wells, Photodiodes, Indium gallium arsenide, Absorption, Indium, Spectroscopy, Microopto electromechanical systems, Diffusion, Dielectrics, Near infrared

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Proceedings Article | 21 April 2006 Paper

Paper

Tunable InP/air MOEMS filter with record breaking selectivity

Michel Garrigues, Jérôme Danglot, Jean-Louis Leclercq

Proceedings Volume 6186, 61860I (2006) https://doi.org/10.1117/12.662815

KEYWORDS: Tunable filters, Microopto electromechanical systems, Reflectors, Mirrors, Optical filters, Reflectivity, Resonators, Electronic filtering, Doping, Indium gallium arsenide

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Proceedings Article | 18 April 2006 Paper

Paper

Compact photonic devices based on 1D and 2D photonic crystal broadband reflectors

S. Boutami, B. Ben Bakir, J.-L. Leclercq, X. Letartre, P. Rojo-romeo, M. Garrigues, C. Seassal, P. Viktorovitch, M. Strassner, L. Le Gratiet, K. Merghem, I. Sagnes

Proceedings Volume 6182, 61821O (2006) https://doi.org/10.1117/12.662843

KEYWORDS: Reflectors, Photonic crystals, Mirrors, Reflectivity, Polarization, Waveguides, Microopto electromechanical systems, Electronic filtering, Waveguide modes, Photons

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Proceedings Article | 7 July 2005 Paper

Paper

Grating enhanced MOEMS: a novel class of beam steering devices

J. Pradelles, M. Garrigues, J. L. Leclercq, P. Viktorovitch

Proceedings Volume 5840, (2005) https://doi.org/10.1117/12.607844

KEYWORDS: Diffraction gratings, Diffraction, Microopto electromechanical systems, Mirrors, Optical design, Tunable filters, Optical switching, Beam steering, Optical filters, Lithography

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Proceedings Article | 15 September 2004 Paper

Paper

Surface operating photonic devices based on 2D photonic crystal: toward 2.5 dimensional microphotonics

Jean-Louis Leclercq, B. BenBakir, Haroldo Hattori, Xavier Letartre, Philippe Regreny, Pedro Rojo-Romeo, Christian Seassal, Pierre Viktorovitch

Proceedings Volume 5450, (2004) https://doi.org/10.1117/12.544803

KEYWORDS: Photons, Photonic crystals, Reflectivity, Integrated optics, Free space optics, Photonic devices, Semiconductors, Microopto electromechanical systems, Reflectors, Reactive ion etching

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Proceedings Article | 11 March 2003 Paper

Paper

InP-membrane photonic devices

Pierre Viktorovitch, Michel Garrigues, Jean Louis Leclercq, Xavier Letartre, Pedro Rojo-Romeo, Christian Seassa

Proceedings Volume 4947, (2003) https://doi.org/10.1117/12.473284

KEYWORDS: Silicon, Photonic crystals, Microopto electromechanical systems, Optical filters, Photons, Free space optics, Dispersion, Photonic devices, Heterojunctions, Semiconductors

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Proceedings Article | 19 April 2002 Paper

Paper

Phase-matching pseudo-resonant tunable InP-based MOEMS

Dan Zhou, K. Sun, Michel Garrigues, Jean Louis Leclercq, Philippe Regreny, Jiangde Peng, Pierre Viktorovitch

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462844

KEYWORDS: Mirrors, Absorption, Sensors, Microopto electromechanical systems, Optical design, Photodetectors, Optical filters, Resonance enhancement, Indium gallium arsenide, Absorption filters

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Proceedings Article | 19 April 2002 Paper

Paper

Monolithic tunable InP-based vertical-cavity-surface emitting laser

Jean Louis Leclercq, Philippe Regreny, Pierre Viktorovitch, A. Bakouboula, Taha Benyattou, Isabelle Sagnes, G. Saint-Girons, C. Meriadec, Alexandru Mereuta, S. Bouchoule, Antonina Plais, Joel Jacquet

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462843

KEYWORDS: Vertical cavity surface emitting lasers, Tunable lasers, Microopto electromechanical systems, Tunable filters, Quantum wells, Wavelength division multiplexing, Ion implantation, Optical pumping, Solids, Surface micromachining

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Proceedings Article | 21 November 2001 Paper

Paper

III-V-semiconductor-based MOEMS devices for optical telecommunications

Michel Garrigues, Jean Louis Leclercq, Pierre Viktorovitch

Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448999

KEYWORDS: Microopto electromechanical systems, Semiconductors, Vertical cavity surface emitting lasers, Tunable filters, Optical filters, Telecommunications, Wavelength division multiplexing, Photodetectors, Reflectors, Reflectivity

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Proceedings Article | 5 April 2001 Paper

Paper

Thermal and mechanical evaluation of micromachined planar spiral inductors

Renato Ribas, Jerome Lescot, Jean Louis Leclercq, Bernard Courtois

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425369

KEYWORDS: Finite element methods, Transformers, Metals, Gallium arsenide, Etching, Microelectromechanical systems, Micromachining, Dielectrics, Thermal analysis, Silicon

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Proceedings Article | 22 August 2000 Paper

Paper

Design and fabrication of optical microcavities using III-V semiconductor-based MOEMS

Pierre Viktorovitch, Jean Louis Leclercq, Eric Goutain, D. Rondi

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396501

KEYWORDS: Microopto electromechanical systems, Optical filters, Semiconductors, Wavelength division multiplexing, Telecommunications, Micromachining, Reflectivity, Tunable filters, Optical amplifiers, Etching

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Proceedings Article | 2 September 1999 Paper

Paper

Optical and mechanical design of an InP-based tunable detector for gas-sensing applications

Paolo Bondavalli, Taha Benyattou, Michel Garrigues, Jean Louis Leclercq, Philippe Regreny, K. Sun, Pierre Viktorovitch, Sebastein Cortial, Xavier Hugon, Christophe Pautet

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361259

KEYWORDS: Quantum wells, Absorption, Mirrors, Indium gallium arsenide, Mechanical engineering, Sensors, Photodiodes, Information operations, Optical design, Reflectivity

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Proceedings Article | 13 April 1999 Paper

Paper

Highly tunable and selective Fabry Perot filter based on InP-air Bragg mirrors for WDM applications

Ronan Le Dantec, Taha Benyattou, Gerard Guillot, Alain Spisser, Jean Louis Leclercq, Pierre Viktorovitch, D. Rondi

Proceedings Volume 3632, (1999) https://doi.org/10.1117/12.344622

KEYWORDS: Mirrors, Optical filters, Wavelength tuning, Tunable filters, Reflectivity, Wavelength division multiplexing, Electronic filtering, Polarization, Micromachining, Mechanical efficiency

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Proceedings Article | 7 April 1999 Paper

Paper

NIR resonant-cavity-enhanced InP/InGaAs strained quantum well interband photodetector

Serguei Jourba, Marie-Paule Besland, Michel Gendry, Michel Garrigues, Jean Louis Leclercq, Pedro Rojo-Romeo, Pierre Viktorovitch, Sebastein Cortial, Xavier Hugon, Christophe Pautet

Proceedings Volume 3629, (1999) https://doi.org/10.1117/12.344568

KEYWORDS: Quantum wells, Absorption, Mirrors, Photodiodes, Quantum efficiency, Indium gallium arsenide, Sensors, Metalorganic chemical vapor deposition, Photodetectors, Indium

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Proceedings Article | 10 March 1999 Paper

Paper

Fabrication of multi-air gap InP-based microstructures for widely tunable optical filters

Alain Spisser, Philippe Regreny, Christian Seassal, Jean Louis Leclercq, Pierre Viktorovitch

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341253

KEYWORDS: Optical filters, Etching, Wavelength division multiplexing, Reflectors, Reflectivity, Fabry–Perot interferometers, Electronic filtering, Surface micromachining, Micromachining, Mirrors

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Proceedings Article | 11 April 1997 Paper

Paper

Exact numerical technique for the analysis of Bragg reflectors in integrated optical filters

Kambiz Pashaei Fakhri, Philippe Gerard, Pierre Benech, Jean Louis Leclercq, Christian Seassal, Pierre Viktorovitch

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271408

KEYWORDS: Reflectors, Waveguides, Optical filters, Dielectrics, Integrated optics, Optical microcavities, Wave propagation, Light scattering, Semiconductor materials, Testing and analysis

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Proceedings Article | 11 April 1997 Paper

Paper

InP-based micromechanical tunable and selective photodetector for WDM systems

Christian Seassal, Jean Louis Leclercq, Xavier Letartre, A. Gagnaire, Michel Gendry, Pierre Viktorovitch, J. Laine, F. Sidoroff, Ronan Le Dantec, C. Miu, Taha Benyattou, Gerard Guillot, D. Rondi, Robert Blondeau

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271441

KEYWORDS: Reflectors, Photodetectors, Semiconductors, Tunable filters, Wavelength division multiplexing, Mirrors, Multilayers, Reflectivity, Etching, Fabry–Perot interferometers

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Proceedings Article | 11 April 1997 Paper

Paper

Optical characterization methods of InP-based micro-opto-electro-mechanical systems

Ronan Le Dantec, Taha Benyattou, Gerard Guillot, Christian Seassal, Jean Louis Leclercq, Xavier Letartre, A. Gagnaire, Michel Gendry, Pierre Viktorovitch, Ramdane Benferhat, D. Rondi, Robert Blondeau

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271421

KEYWORDS: Reflectivity, Bridges, Semiconductors, Mirrors, Profilometers, Indium gallium arsenide, Microopto electromechanical systems, Objectives, Etching, Telecommunications

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Proceedings Article | 11 April 1997 Paper

Paper

Strength of indium phosphide-based microstructures

Staffan Greek, Klas Hjort, Jan-Ake Schweitz, Christian Seassal, Jean Louis Leclercq, Michel Gendry, Marie-Paule Besland, Pierre Viktorovitch, C. Figuet, V. Souliere, Y. Monteil

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271420

KEYWORDS: Reactive ion etching, Etching, Silicon, Gallium arsenide, Microopto electromechanical systems, Optoelectronics, Indium, Indium gallium arsenide, Liquids, Dry etching

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Proceedings Article | 23 September 1996 Paper

Paper

Collective fabrication of gallium-arsenide-based microsystems

Jean Michel Karam, Bernard Courtois, M. Holjo, Jean Louis Leclercq, Pierre Viktorovitch

Proceedings Volume 2879, (1996) https://doi.org/10.1117/12.251219

KEYWORDS: Gallium arsenide, Etching, Silicon, Field effect transistors, Microsystems, Chemical species, Micromachining, Microelectronics, Manufacturing, Wet etching

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Showing 5 of 36 publications

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