CAR blanks performance for advanced reticle fabrication

Masahiro Hashimoto; Yasunori Yokoya; Takao Higuchi; Fumiko Ohta; Shouichi Kawashima; Yasushi Ohkubo

doi:10.1117/12.504183

28 August 2003 CAR blanks performance for advanced reticle fabrication

Masahiro Hashimoto, Yasunori Yokoya, Takao Higuchi, Fumiko Ohta, Shouichi Kawashima, Yasushi Ohkubo

Proceedings Volume 5130, Photomask and Next-Generation Lithography Mask Technology X; (2003) https://doi.org/10.1117/12.504183
Event: Photomask and Next Generation Lithography Mask Technology X, 2003, Yokohama, Japan

Abstract

DUV (Deep Ultra-Violet) laser reticle writers were released to the market for advanced reticle fabrication in 2002, AZ-DX1100P resist (for KrF lithography) has historically been employed for these tools. To respond to further high-end requirements, a new resist more friendly to DUV reticle fabrication is needed. FEP171 is a positive-type CAR (Chemically amplified resist) developed for EB reticle fabrication, which is sensitive to DUV as well. In this paper, we have investigated the applicability of FEP171-coated blanks for DUV reticle fabrication. As the results show, FEP171 could achieve 200 nm patterns by DUV exposure. FEP171 blanks showed superior performance in resolution and profile as compared to AZ-DX1100P. FEP171 blanks are promising for DUV reticle fabrication as well as EB reticle fabrication.

Citation Download Citation

Masahiro Hashimoto, Yasunori Yokoya, Takao Higuchi, Fumiko Ohta, Shouichi Kawashima, and Yasushi Ohkubo "CAR blanks performance for advanced reticle fabrication", Proc. SPIE 5130, Photomask and Next-Generation Lithography Mask Technology X, (28 August 2003); https://doi.org/10.1117/12.504183

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available