Anodic bond characteristics of Si-wafer and MLCA using Pyrex #7740 glass intermediate layer

Gwiy-Sang Chung; Jae-min Kim

doi:10.1117/12.522858

2 April 2004 Anodic bond characteristics of Si-wafer and MLCA using Pyrex #7740 glass intermediate layer

Gwiy-Sang Chung, Jae-min Kim

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.522858
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

This paper describes anodic bonding characteristics of MLCA to Si-wafer using evaporated Pyres #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties that were deposited on MLCA under optimum RF magneto conditions (Ar 100%, input power 1 W/cm2). After annealing in 450°C for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, 400°C in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces did not occur during actuation test. Therefore, it is expected that the anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

Citation Download Citation

Gwiy-Sang Chung and Jae-min Kim "Anodic bond characteristics of Si-wafer and MLCA using Pyrex #7740 glass intermediate layer", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.522858

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available