Packaging considerations for reliability of electrically controlled MEMS VOA

Yeong Gyu Lee; Seok Kee Hong; Moo Youn Park; Sung Cheon Jung; Seong Hun Lee

doi:10.1117/12.524603

24 January 2004 Packaging considerations for reliability of electrically controlled MEMS VOA

Yeong Gyu Lee, Seok Kee Hong, Moo Youn Park, Sung Cheon Jung, Seong Hun Lee

Proceedings Volume 5346, MOEMS and Miniaturized Systems IV; (2004) https://doi.org/10.1117/12.524603
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Unlike other Micro Electro Mechanical System (MEMS) type devices packaging, MEMS type optical devices require higher standard of packaging technique and careful material selection than any other MEMS type products. A number of attempts and a lot of efforts have been devoted to achieve a reliable MEMS type optical device. In this paper, we have achieved highly reliable MEMS type variable optical attenuator (VOA), which passed the Telcordia reliability standard for optical components, by our advanced packaging process and careful reliability considerations in the initial product design step. Our advanced packaging process includes, ultra fine optical fibre alignment on the MEMS chip, securing the aligned optical fibre and hermetic sealing technique. This paper will discuss above advanced packaging issues in detail and reliability test result of the device fabricated according to the developed packaging method.

Citation Download Citation

Yeong Gyu Lee, Seok Kee Hong, Moo Youn Park, Sung Cheon Jung, and Seong Hun Lee "Packaging considerations for reliability of electrically controlled MEMS VOA", Proc. SPIE 5346, MOEMS and Miniaturized Systems IV, (24 January 2004); https://doi.org/10.1117/12.524603

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available