Polygon microlens array design and fabrication using thermal pressing in LIGA-like process

Ruey Fang Shyu; Hsiharng Yang; Chi-Ting Ho; Wen-Hsiang Hsieh; Feng-Tsai Weng

doi:10.1117/12.581248

23 February 2005 Polygon microlens array design and fabrication using thermal pressing in LIGA-like process

Ruey Fang Shyu, Hsiharng Yang, Chi-Ting Ho, Wen-Hsiang Hsieh, Feng-Tsai Weng

Proceedings Volume 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II; (2005) https://doi.org/10.1117/12.581248
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

This paper describes a simple and inexpensive technique to design and fabricate polygon microlens array using thermal pressing technique. Polygon microlens array molds were fabricated by using lithography and electroforming process. Microlens pattern was designed on a photomask and transferred to a substrate through photoresist patterning. The electroforming technology was used to convert the photoresist microlens patterns into metallic molds. A hot pressing machine was used to replicate microlens array in PC substrate. The compression pressure, temperature, and pressing time were key parameters to design and manufacture microlens array. The optical properties of these microlenses have been characterized by measuring their focal lengths. The average cylindrical microlenses radii of curvature were 315μm~420μm and the average sag heights were 2.98μm~4.03μm.

Citation Download Citation

Ruey Fang Shyu, Hsiharng Yang, Chi-Ting Ho, Wen-Hsiang Hsieh, and Feng-Tsai Weng "Polygon microlens array design and fabrication using thermal pressing in LIGA-like process", Proc. SPIE 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II, (23 February 2005); https://doi.org/10.1117/12.581248

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