Effects of high moisture on the purification of clean compressed air

Joe Rotter; Daniel Alvarez Jr.; Allan Tram

doi:10.1117/12.601035

10 May 2005 Effects of high moisture on the purification of clean compressed air

Joe Rotter, Daniel Alvarez Jr., Allan Tram

Author Affiliations +

Proceedings Volume 5752, Metrology, Inspection, and Process Control for Microlithography XIX; (2005) https://doi.org/10.1117/12.601035
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

A method was developed to measure purifier siloxane removal efficiencies from air under dry and humid conditions. This method measured hydrocarbons to 1 part-per-trillion (ppt) concentration levels with a Gas Chromatograph and Flame Ionization Detector (GC/FID). Several media types were examined: Activated Alumina (AA), Activated Carbon (AC), Bead-shaped Activated Carbon (BAC), a Proprietary Inorganic Material (PIM) and a Zeolite (ZEO). Under dry conditions, all five materials removed the siloxane challenge to below 1ppt. Under humid conditions the AC material had a removal efficiency of 286 ppt. The AA, BAC, PIM and ZEO removed the siloxane challenge to below 1 ppt under humid conditions. After media saturation was reached, the materials were regenerated and siloxane removal efficiencies were re-examined. Under humid conditions only the AA, PIM and ZEO materials were regenerable to below 1ppt efficiency levels.

Citation Download Citation

Joe Rotter, Daniel Alvarez Jr., and Allan Tram "Effects of high moisture on the purification of clean compressed air", Proc. SPIE 5752, Metrology, Inspection, and Process Control for Microlithography XIX, (10 May 2005); https://doi.org/10.1117/12.601035

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