The improvement of thick oxidized porous silicon layer growth process

Jian Li; Junming An; Hongjie Wang; Junlei Xia; Dingshan Gao; Xiongwei Hu

doi:10.1117/12.667708

23 January 2006 The improvement of thick oxidized porous silicon layer growth process

Jian Li, Junming An, Hongjie Wang, Junlei Xia, Dingshan Gao, Xiongwei Hu

Proceedings Volume 6029, ICO20: Materials and Nanostructures; 60290S (2006) https://doi.org/10.1117/12.667708
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Oxidizing thick porous silicon layer into silicon dioxide is a timesaving and low-cost process for producing thick silicon dioxide layer used in silicon-based optical waveguide devices. The solution of H₂O₂ is proposed to post-treat thick porous silicon (PS) films. The prepared PS layer as the cathode is applied about 10mA/cm² current in mixture of ethanol, HF, and H₂O₂ solutions, in order to improve the stability and the smoothness of the surface. With the low-temperature dry-O₂ pre-oxidizations and high-temperature wet O₂ oxidizations process, a high-quality SiO₂ 30 μm thickness layer that fit for the optical waveguide device was prepared. The SEM images show significant improved smoothness on the surface of oxidized PS thick films, the SiO₂ film has a stable and uniformity reflex index that measured by the prism coupler, the uniformity of the reflex index in different place of the wafer is about 0.0003.

Citation Download Citation

Jian Li, Junming An, Hongjie Wang, Junlei Xia, Dingshan Gao, and Xiongwei Hu "The improvement of thick oxidized porous silicon layer growth process", Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290S (23 January 2006); https://doi.org/10.1117/12.667708

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available