Micro electronic and macro optical parameters of the ITO films prepared by DC sputtering for electrochromic applications

H. N. Cui; V. Teixeira; Li-Jian Meng; E. Fortunato

doi:10.1117/12.668090

1 February 2006 Micro electronic and macro optical parameters of the ITO films prepared by DC sputtering for electrochromic applications

H. N. Cui, V. Teixeira, Li-Jian Meng, E. Fortunato

Author Affiliations +

Proceedings Volume 6034, ICO20: Optical Design and Fabrication; 603407 (2006) https://doi.org/10.1117/12.668090
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

The refractive index (n), the extinction coefficient (κ), dielectric constant ε, free carrier density (n_c) and the carrier mobility (μ) of the ITO (Indium-Tin-Oxide) films with different deposition time (or thickness), oxygen partial pressure ratio (P_O2) and annealing temperature were measured and studied. The calculated optical parameter-extinction coefficient (κ) was obtained from the diffuse reflectance spectra using "scattering model". The Lorentz oscillator classical model has also been used for fitting the ellipsometric spectra in order to obtain both n and κ values. As comparing the Swanepoel method was used for the refractive index. Clearly the results of the "scattering model", Swanepoel method and Ellipsometric method agree in magnitude. The films prepared at different P_O2 show different behaviour of the refractive index and extinction coefficient. The electrical characteristic parameter n_c and μ were compared and studied by experimental measurements and calculations using an equation that relates the dielectric function and photo-energy (Drude theory) by Mathematic-4.1 software. Both measured and calculated values coincide in magnitude.

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H. N. Cui, V. Teixeira, Li-Jian Meng, and E. Fortunato "Micro electronic and macro optical parameters of the ITO films prepared by DC sputtering for electrochromic applications", Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 603407 (1 February 2006); https://doi.org/10.1117/12.668090

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