Damping characteristic analysis of MEMS inertial devices

Yufeng Zhang; Xiaowei Liu; Weiping Chen

doi:10.1117/12.664148

21 March 2006 Damping characteristic analysis of MEMS inertial devices

Yufeng Zhang, Xiaowei Liu, Weiping Chen

Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 60400E (2006) https://doi.org/10.1117/12.664148
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

The damping effects of MEMS inertial devices like micro accelerometers is studied. The damping analysis governing equation, the Reynolds equation, is the fundamental equation in this work. For small amplitude sinusoidal motions, which are governed by the linearized form of the Reynolds equation, both damping and compressibility effects are modeled numerically. Analytical solutions of the linearized Reynolds equation for micro inertial structures with various simple geometries are summarized. A procedure of solving the linearized model using typical commercial finite element analysis software is demonstrated. A numerical example of dynamical macromodel for a capacitive accelerometer indicates that viscous damping dominates at the dynamic characteristic of inertial devices. The theory and method of estimating damping effects for inertial devices with small amplitude motions are also presented. The theory is derived from the structural dynamic modal analysis and the simulation of the linearized Reynolds equation. The theoretical damping analysis equation for inertial microstructures is derived for the application of the small deflections. Simulation analysis can be used to compute the damping including the squeeze film and slip film cases. The method is applicable for general conditions, and makes it easy to make the dynamic lumped simulation model. It is useful at the beginning of the design of MEMS inertial devices affected by the damping effect.

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Yufeng Zhang, Xiaowei Liu, and Weiping Chen "Damping characteristic analysis of MEMS inertial devices", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 60400E (21 March 2006); https://doi.org/10.1117/12.664148

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KEYWORDS

Microelectromechanical systems

Microfluidics

Motion models

Finite element methods

Computer simulations

Holmium

Instrument modeling

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