Integration of the retical systematic CD errors into an OPC modeling and correction

Geng Han; Scott Mansfield; Azalia Krasnoperova

doi:10.1117/12.657194

21 March 2006 Integration of the retical systematic CD errors into an OPC modeling and correction

Geng Han, Scott Mansfield, Azalia Krasnoperova

Proceedings Volume 6154, Optical Microlithography XIX; 61543I (2006) https://doi.org/10.1117/12.657194
Event: SPIE 31st International Symposium on Advanced Lithography, 2006, San Jose, California, United States

Abstract

The impact of mask CD non-uniformity on the accuracy of optical proximity correction (OPC) models has been observed on several critical levels. In the current OPC model calibration flow, the mask effect is not explicitly separated from the optical and resist models. Instead, the resist model is compensating for the mask errors. In this paper, we report a detailed study of the effect of mask CD non-uniformity on OPC model accuracy using the established OPC model calibration flow. The influence of mask CD non-uniformity on the through process behavior of an OPC model is also discussed. A possible OPC flow to take the systematic mask CD error into consideration is proposed and a detailed study of mask modeling is present.

Citation Download Citation

Geng Han, Scott Mansfield, and Azalia Krasnoperova "Integration of the retical systematic CD errors into an OPC modeling and correction", Proc. SPIE 6154, Optical Microlithography XIX, 61543I (21 March 2006); https://doi.org/10.1117/12.657194

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available