Laser interferometer used for nanometer vibration measurements

Jiaxing Sun; Jun Yang; Zhihai Liu; Libo Yuan

doi:10.1117/12.725893

5 March 2007 Laser interferometer used for nanometer vibration measurements

Jiaxing Sun, Jun Yang, Zhihai Liu, Libo Yuan

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 65952O (2007) https://doi.org/10.1117/12.725893
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

A novel laser interferometer which adopts alternating modulation phase tracking homodyne technique is proposed. The vibration of nanometer-accuracy is measured with the improved Michelson interferometer by adding cat's eye moving mirror and PZT phase modulation tracking structure. The working principle and the structure of the interferometer are analyzed and the demodulation scheme of alternating phase modulation and tracking is designed. The signal detection is changed from direct current detecting to alternating current detecting. The signal's frequency spectrum transform is achieved, the low-frequency noise jamming is abated, the Signal-to-Noise of the system is improved and the measured resolution is enhanced. Phase tracking technique effectively suppresses the low-frequency noise which is caused by outside environment factors such as temperature and vibration, and the stability of the system is enhanced. The experimental results indicate that for the signal with the frequency of 100Hz and the amplitude of 25nm, the output Signal-to-Noise is 30dB and the measured resolution is 1nm.

Citation Download Citation

Jiaxing Sun, Jun Yang, Zhihai Liu, and Libo Yuan "Laser interferometer used for nanometer vibration measurements", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 65952O (5 March 2007); https://doi.org/10.1117/12.725893

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