Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks

Chu-Shik Kang; Jae Wan Kim; Jong-Ahn Kim; Tae Bong Eom

doi:10.1117/12.733712

10 September 2007 Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks

Chu-Shik Kang, Jae Wan Kim, Jong-Ahn Kim, Tae Bong Eom

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Proceedings Volume 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III; 66720O (2007) https://doi.org/10.1117/12.733712
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

A total integrated scattering (TIS) system consisting of an integrating sphere has been developed in KRISS for the purpose of measuring the effective roughness amplitude of gauge blocks and platens, which are necessary for the correction of phase shift due to roughness difference between gauge block and platen, in the calibration of gauge blocks by optical interferometry. Details on the TIS system and its calibration by using two different methods are described. The uncertainty of the effective roughness amplitude measurement by using the TIS system is evaluated to be 2 nm (k=1).

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Chu-Shik Kang, Jae Wan Kim, Jong-Ahn Kim, and Tae Bong Eom "Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks", Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720O (10 September 2007); https://doi.org/10.1117/12.733712

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KEYWORDS

Calibration

Integrating spheres

Light scattering

Phase shifts

Surface roughness

Optical calibration

Reflection

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