Optical waveguide gratings in chalcogenide glass

Xin Xia; Mehmet Solmaz; Hyunsoo Park; Xing Cheng; Christi K. Madsen

doi:10.1117/12.768584

12 February 2008 Optical waveguide gratings in chalcogenide glass

Xin Xia, Mehmet Solmaz, Hyunsoo Park, Xing Cheng, Christi K. Madsen

Proceedings Volume 6896, Integrated Optics: Devices, Materials, and Technologies XII; 689607 (2008) https://doi.org/10.1117/12.768584
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

Fabrication results are reported for making optical gratings in chalcogenide glasses. Two approaches are being investigated: 1) thermal nanoimprinting of the glass using a mold master, and 2) direct patterning of the chalcogenide glass using a combination of electron beam lithography (EBL) and reactive ion etching (RIE). Preliminary results are presented for the nanoimprint and EBL experiments. The nanoimprint results show very smooth sidewalls.

Citation Download Citation

Xin Xia, Mehmet Solmaz, Hyunsoo Park, Xing Cheng, and Christi K. Madsen "Optical waveguide gratings in chalcogenide glass", Proc. SPIE 6896, Integrated Optics: Devices, Materials, and Technologies XII, 689607 (12 February 2008); https://doi.org/10.1117/12.768584

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