High resolution nanoimprint templates for dual damascene: fabrication and imprint results

Mathias Irmscher; Joerg Butschke; Ron Carpio; Brook Chao; Wei-Lun Jen; Corinna Koepernik; Lorenz Nedelmann; Jordan Owens; Frank Palmieri; Marcus Pritschow; Christian Reuter; Holger Sailer; Ken Satoodeh; Jeff Wetzel; Bruce Wilks; Grant Willson

doi:10.1117/12.772295

26 March 2008 High resolution nanoimprint templates for dual damascene: fabrication and imprint results

Mathias Irmscher, Joerg Butschke, Ron Carpio, Brook Chao, Wei-Lun Jen, Corinna Koepernik, Lorenz Nedelmann, Jordan Owens, Frank Palmieri, Marcus Pritschow, Christian Reuter, Holger Sailer, Ken Satoodeh, Jeff Wetzel, Bruce Wilks, Grant Willson

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69210D (2008) https://doi.org/10.1117/12.772295
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

A dual damascene template fabrication process has been developed, which enables the structuring of high-resolution, high-aspect pillars on top of lines. Based on this technology templates with three different designs have been fabricated and characterized. Two templates are dedicated for an assessment of the fabrication process using a regular test design on one hand and an arbitrary CMOS design on the other hand. With the third template via chains shall be later realized as demonstrator for electrical tests. The templates have been imprinted in resist and sacrificial material on an Imprio 55 and an Imprio 100 tool. The usability of each fabricated template could be confirmed for the specific application. For the template manufacturing a Vistec variable shape e-beam (VSB) writer SB352HR and appropriate positive-tone and negative-tone chemically amplified resists (CAR) have been used.

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Mathias Irmscher, Joerg Butschke, Ron Carpio, Brook Chao, Wei-Lun Jen, Corinna Koepernik, Lorenz Nedelmann, Jordan Owens, Frank Palmieri, Marcus Pritschow, Christian Reuter, Holger Sailer, Ken Satoodeh, Jeff Wetzel, Bruce Wilks, and Grant Willson "High resolution nanoimprint templates for dual damascene: fabrication and imprint results", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69210D (26 March 2008); https://doi.org/10.1117/12.772295

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